生物医学システムおよび新興技術ジャーナル

Measurement and Consideration of the Breakdown Voltage in a MicroGap ESD

Abstract

Ishigami S, Kawamata K and Minegishi S

We examined that the physical processes of an electrostatic discharge occurring on the applied voltage of less than 330 V and at gap lengths of several micrometers by measuring the discharge current and electric fields. As a result, it was confirmed that the conventional Paschen’s law cannot be applied to the characteristics of discharges on the applied voltage of less than 330 V in the gap lengths of less than 4 μm in both cases of approaching electrode and fixed electrode. The breakdown process was explained in terms of the equation describes the relationship between high density electrons and electric-field strength that is applied for high electric-field. The proposed equation expressed both the conventional Paschen’s law and the breakdown process below the Paschen minimum.