材料科学および工学ジャーナル

Direct Patterning with Femtosecond Laser for Fabricating Ge2Sb2Te5 Stamps and Imprinting of UV Resins

Abstract

Lin CB, Cheng PY and Lin HY

A novel method to fabricate a micro-scaled meter metallic stamp for imprinting is proposed in this study. Phase transformation film of amorphous Ge2Sb2Te5 (GST) was first deposited on cleaned silicon substrates by using DC sputtering process. The GST film is then irradiated with the femtosecond laser pulse directly through the photomask to photomelt and induces 2D-crystalline marks formed on the original amorphous region. Owing to the varied chemical properties between the amorphous region and crystalline marks, the crystalline marks were etched by using nitric acid mixed with ethanol. It is with this method that a micro-scaled meter metallic stamp was fabricated. Furthermore, the SU-8 polymeric patterns were successfully replicated and easily demolded from the etched GST stamp by using imprinting. Ultimately, with imprinting, the etched GST stamp could successfully replicate and also easily demold the SU-8 polymeric patterns.